AlN thin film deposition by pulsed laser ablation of Al in NH 3

Author: Mele A.   Guidoni A.G.   Di Palma T.M.   Orlando S.   Teghil R.   Flamini C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.295, Iss.1, 1997-02, pp. : 77-82

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Abstract