Oxidation behavior of Cr-Al-N-O thin films prepared by pulsed laser deposition

Author: Hirai M.   Saito H.   Suzuki T.   Suematsu H.   Jiang W.   Yatsui K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 122-125

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Abstract