Electromigration in layered Al lines studied by in-situ ultra-high voltage electron microscopy

Author: Mori H.   Komatsu M.   Okabayashi H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 25-29

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Abstract