Quantitative acoustic microscopy for characterization of the interface strength of diamond-like carbon thin films

Author： Parthasarathi S.   Tittmann B.R.   Ianno R.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 42-50

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