Ultrasonic micromachining on Al thin film using atomic force microscopy combined quartz crystal resonator

Author: Iwata F.   Kawaguchi M.   Aoyama H.   Sasaki A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 122-126

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Abstract