Morphology of TiSi 2 films on Si formed from co-deposited Ti and Si

Author: Herner S.B.   Krishnamoorthy V.   Naman A.   Jones K.S.   Gossmann H.-J.   Tung R.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 127-132

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Abstract