Effect of process parameters on the characteristics of indium tin oxide thin film for flat panel display application

Author： Byung H.L.   Iee G.K.   Sung W.C.   Lee S.-H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 25-30

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