Indium-tin-oxide thin film prepared by microwave-enhanced d.c. reactive magnetron sputtering for telecommunication wavelengths

Author： Meng L.-J.   Crossan E.   Voronov A.   Placido F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 80-86

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