The chemistry, structure, and resulting wear properties of magnetron-sputtered NbN thin films

Author: Havey K.S.   Walck S.D.   Zabinski J.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.303, Iss.1, 1997-07, pp. : 238-245

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Abstract