Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films

Author： Inoue S. Saeki T. Uchida H. Koterazawa K. Iwasa M.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 257-261

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