A method for monitoring the thickness of semiconductor and dielectric thin films: Application to the determination of large-area thickness profiles

Author: Laaziz Y.   Bennouna A.   Elazhari M.Y.   Outzourhit A.   Chahboun N.   Ameziane E.L.   Ramiro-Bargueno J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.303, Iss.1, 1997-07, pp. : 255-263

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Abstract