Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry

Author： Franquet A.   De Laet J.   Schram T.   Terryn H.   Subramanian V.   van Ooij W.J.   Vereecken J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.384, Iss.1, 2001-03, pp. : 37-45

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