Influence of the initial nitrogen content in titanium films on the nitridation and silicidation processes

Author： Jimenez C.   Perez-Casero R.   Martinez-Duart J.M.   Perez-Rigueiro J.   Vazquez L.   Fernandez M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.305, Iss.1, 1997-08, pp. : 185-190

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