Layered growth of boron nitride thin films

Author: Plass M.F.   Fukarek W.   Kolitsch A.   Schell N.   Moller W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.305, Iss.1, 1997-08, pp. : 172-184

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Abstract