Effects of carbon incorporation on the structure and mechanical properties of cubic boron nitride films

Author： Ong C.W. Zhao X.-A. Chan K.F. Ng Y.M. Chan P.W. Choy C.L. Kwok R.W.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.307, Iss.1, 1997-10, pp. : 152-155

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