Structure, composition and tribological properties of carbon nitride films

Author： Czyzniewski A.   Precht W.   Pancielejko M.   Myslinski P.   Walkowiak W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 384-387

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