Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures

Author: Martn E.   Sanz L.F.   Jimenez J.   Perez-Rodrguez A.   Morante J.R.   Aspar B.   Margail J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.311, Iss.1, 1997-12, pp. : 225-229

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Abstract