Twist-type silicon bicrystals and compliant substrates prepared from silicon-on-insulator wafers

Author: Chen Chih   Tu K. N.   Tung C. H.   Sheng T. T.   Ploessl A.   Scholz R.   Gosele U.  

Publisher: Taylor & Francis Ltd

ISSN: 0141-8610

Source: Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol.80, Iss.4, 2000-04, pp. : 881-891

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Abstract