Optical emission spectroscopy study of a radio-frequency magnetron discharge used for the fabrication of X-ray multilayer mirror

Author： Cilia M.   Yakshin A.   Trambly H.   Vidal B.   Bretagne J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 320-326

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