Fabrication of X-ray masks and applications for optical switch molding

Author： Shan X.C.   Maeda R.   Ikehara T.   Mekaru H.   Hattori T.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 224-229

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