Density and elastic constants of hot-filament-deposited polycrystalline diamond films: Methane concentration dependence

Author: Albert D.   Kulisch W.   Kuschnereit R.   Hess P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 66-72

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Abstract