Effect of coupling of radio-frequency plasma on the growth of diamond films in a hot filament reactor

Author: Pai M.P.   Musale D.V.   Kshirsagar S.T.   Mitra A.   Sainkar S.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 167-176

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Abstract