Chemical vapour deposition of BC 2 N films and their laser-induced etching with SF 6

Author: Popov C.   Saito K.   Koga Y.   Fujiwara S.   Inanov B.   Shanov V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 99-105

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Abstract