Electron beam induced damage in N-rich SiN x films deposited by plasma enhanced chemical vapour deposition

Author： Vouroutzis N. Paloura E.C. Kuo Y. Lioutas C.B.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.296, Iss.1, 1997-03, pp. : 28-31

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