Deposition of low temperature Si-based insulators by the electron cyclotron resonance plasma method

Author: Garcia S.   Martin J.M.   Martil I.   Fernandez M.   Gonzalez-Diaz G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 116-119

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Abstract