Optical emission spectroscopy of rf glow discharges of methane-silane mixtures

Author： Andujar J.L. Pascual E. Viera G. Bertran E.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 120-123

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