Preparation of transparent conducting Zn 2 In 2 O 5 films by d.c. magnetron sputtering

Author: Minami T.   Kakumu T.   Takeda Y.   Takata S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 326-329

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Abstract