Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration

Author： Zlatanovic M.   Popovic N.   Bogdanov Z.   Belosevac R.   Kunosic A.   Goncic B.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 463-467

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