Exploring CMP solutions to planarity challenges with tungsten plugs

Author: Mendonca J.   Murella K.   Kim I.   Schlueter J.   Karlsrud C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 103-109

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract