Thermal stability of Al/barrier/TiSi x multilayer structures

Author: Lu J.P.   Hsu W.Y.   Hong Q.Z.   Dixit G.A.   Luttmer J.D.   Havemann R.H.   Chen P.J.   Tsai H.L.   Magel L.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 20-25

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Abstract