Oriented wedge-like hillocks on Al-0.5 wt.%Cu/TiN/SiO 2 /Si multilayer structure

Author: Wang P.   Hwang J.   Chuang A.   Huang F.-S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.358, Iss.1, 2000-01, pp. : 292-301

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Abstract