Structural change of TiN/Ti/SiO 2 multilayers by N 2 annealing

Author: Hamamura H.   Itoh H.   Shimogaki Y.   Aoyama J.   Yoshimi T.   Ueda J.   Komiyama H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 31-34

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Abstract