Effect of Sb as a surfactant on the inner diffusion of epilayer Ge atoms into Si substrate

Author: Jiang Z.   Xu A.   Hu D.   Zhu H.   Liu X.   Wang X.   Mao M.   Zhang X.   Hu J.   Huang D.   Wang X.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 116-119

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Abstract