Leakage current distribution in ultrathin oxide on silicon surface with step/terrace structures

By Murata M.   Tokuda N.   Hojo D.   Yamabe K.  

Thin Solid Films, Vol. 414, Iss. 1, 2002-07 ,pp. : 56-62

Elsevier

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Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: Impact of accuracy of the silicon optical constants

By Tonova D.   Depas M.   Vanhellemont J.  

Thin Solid Films, Vol. 288, Iss. 1, 1996-11 ,pp. : 64-68

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Mechanical analysis of ultrathin oxide coatings on polymer substrates in situ in a scanning electron microscope

By Rochat G.   Leterrier Y.   Fayet P.   Manson J.-A.E.  

Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. : 204-210

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Self-limiting chemical vapor deposition of an ultra-thin silicon oxide film using tri-(tert-butoxy)silanol

By Miller K.A.   John C.   Zhang K.Z.   Nicholson K.T.   McFeely F.R.   Banaszak Holl M.M.  

Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. : 78-82

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Ultrathin silicon oxide films: Deposited by synchrotron irradiation of condensed layers of silanes and water

By Moore J.F.   Strongin D.R.  

Thin Solid Films, Vol. 280, Iss. 1, 1996-07 ,pp. : 101-106

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