Leakage current distribution in ultrathin oxide on silicon surface with step/terrace structures

Author: Murata M.   Tokuda N.   Hojo D.   Yamabe K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.414, Iss.1, 2002-07, pp. : 56-62

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Abstract