Growth of nitrogen stabilised cubic ZrO 2 phase by reactive magnetron sputtering using two reactive gases

By Collard S.   Kupfer H.   Hoyer W.   Hecht G.  

Vacuum, Vol. 55, Iss. 2, 1999-11 ,pp. : 153-157

Elsevier

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Properties of aluminium oxide thin films deposited by reactive magnetron sputtering

By Koski K.   Holsa J.   Juliet P.  

Thin Solid Films, Vol. 339, Iss. 1, 1999-02 ,pp. : 240-248

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Aluminium nitride thin films deposited by DC reactive magnetron sputtering

By Dimitrova V.   Manova D.   Paskova T.   Uzunov T.   Ivanov N.   Dechev D.  

Vacuum, Vol. 51, Iss. 2, 1998-10 ,pp. : 161-164

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Conductivity and dielectric properties of silicon nitride thin films prepared by RF magnetron sputtering using nitrogen gas

By Awan S.A.   Gould R.D.  

Thin Solid Films, Vol. 423, Iss. 2, 2003-01 ,pp. : 267-272

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Deposition and characterization of nitrogen containing stainless steel coatings prepared by reactive magnetron sputtering

By Schneider J.M.   Rebholz C.   Voevodin A.A.   Leyland A.   Matthews A.  

Vacuum, Vol. 47, Iss. 9, 1996-09 ,pp. : 1077-1080

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