Growth of Fe 3 N films via chemical vapor deposition of iron acetylacetonate and anhydrous ammonia

Author: Roberson S.L.   Finello D.   Banks A.D.   Davis R.F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.326, Iss.1, 1998-08, pp. : 47-50

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Abstract