Structural modifications and temperature stability of silicon incorporated diamond-like a-C:H films

Author: Camargo S.S.   Santos R.A.   Baia Neto A.L.   Carius R.   Finger F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 130-135

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Abstract