Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

Author: Baia Neto A.L.   Santos R.A.   Camargo S.S.J.   Freire F.L.J.   Carius R.   Beyer W.   Finger F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.293, Iss.1, 1997-01, pp. : 206-211

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Abstract