Author: Taylor D.J. Fleig P.F. Hietala S.L.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 257-261
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Influence of stress in thin film modulus measurements by the vibrating reed technique
By Harms U. Kempen L. Neuhauser H.
Thin Solid Films, Vol. 323, Iss. 1, 1998-06 ,pp. :
Elastic-plastic characterization of thin films using nanoindentation technique
Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. :
Production and Characterization of Carbon Thin Films by the Magnetron Sputtering Technique
Materials Science Forum, Vol. 2016, Iss. 881, 2017-02 ,pp. :