Author： Harms U. Kempen L. Neuhauser H.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 153-157
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Technique for characterization of thin film porosity
By Taylor D.J. Fleig P.F. Hietala S.L.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :
Access to resources
Recommend
Measurements of residual stress in the thin film micro-gas sensors containing metallic layers
By Kim Y. Choo S.-H.
Thin Solid Films, Vol. 394, Iss. 1, 2001-08 ,pp. :
Analysis of thin film stress measurement techniques
By Malhotra S.G. Rek Z.U. Yalisove S.M. Bilello J.C.
Thin Solid Films, Vol. 301, Iss. 1, 1997-06 ,pp. :
Stress evolution in polycrystalline thin film reactions
Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. :