Raman microscopy study of pulsed laser ablation deposited silicon carbide films

Author： Neri F.   Trusso S.   Vasi C.   Barreca F.   Valisa P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 290-294

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