X-ray photoelectron spectroscopy and grazing incidence X-ray reflectivity study of silicon nitride thin films

Author: Li B.   Fujimoto T.   Fukumoto N.   Honda K.   Kojima I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 140-144

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract