Effects of deposition pressure on structure and hardness of amorphous carbon nitride films synthesized by shielded arc ion plating

Author: Taki Y.   Tajima N.   Takai O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 165-172

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Abstract