Thin film characterization of diamond-like carbon films prepared by r.f. plasma chemical vapor deposition

By Hirakuri K.K.   Minorikawa T.   Friedbacher G.   Grasserbauer M.  

Thin Solid Films, Vol. 302, Iss. 1, 1997-06 ,pp. : 5-11

Elsevier

Access to resources Recommend Favorite

RuO 2 thin film fabrication with plasma-enhanced chemical vapor deposition

By Park S.-E.   Kim H.-M.   Kim K.-B.   Min S.-H.  

Thin Solid Films, Vol. 341, Iss. 1, 1999-03 ,pp. : 52-54

Elsevier

Access to resources Recommend Favorite

Selective chemical vapor deposition on excimer-laser-patterned polytetrafluoroethylene from hexafluoroacetylacetonate copper (I) vinyltrimethylsilane

By Kodas T.T.   Perry W.L.   Hampden-Smith M.J.   Jain A.  

Thin Solid Films, Vol. 262, Iss. 1, 1995-06 ,pp. : 7-11

Elsevier

Access to resources Recommend Favorite

A Comparison of Diamond-Like Carbon Films Properties Obtained by Plasma Enhanced Chemical Vapor Deposition and Electro-Deposition

By  

Materials Science Forum, Vol. 2016, Iss. 852, 2016-05 ,pp. : 1029-1033

Trans Tech Publications

Access to resources Recommend Favorite

Study of diamond film growth mechanism on porous silicon during hot-filament chemical vapor deposition

By Liao Y.   Ye F.   Shao Q.Y.   Chang C.   Wang G.Z.   Fang R.C.  

Thin Solid Films, Vol. 368, Iss. 2, 2000-06 ,pp. : 211-215

Elsevier

Access to resources Recommend Favorite