Transparent conductive ZnO film preparation by alternating sputtering of ZnO:Al and Zn or Al targets

Author: Tominaga K.   Umezu N.   Mori I.   Ushiro T.   Moriga T.   Nakabayashi I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 35-39

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Abstract