Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Author： Szyszka B. Sittinger V. Jiang X. Hong R.J. Werner W. Pflug A. Ruske M. Lopp A.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 179-183

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