Deposition conditions of SrTiO 3 films on various substrates by CVD and their dielectric properties

Author: Funakubo H.   Takeshima Y.   Nagano D.   Saiki A.   Shinozaki K.   Mizutani N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 71-76

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Abstract