Dielectric and leakage current characteristics of Ba(Ti 1-x Zr x )O 3 thin films deposited by rf magnetron sputtering

Author: Wu T.-B.   Wu C.-M.   Chen M.-L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 77-81

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Abstract