Synthesis of silicon carbide thin films by ion beam sputtering

Author： Valentini A.   Convertino A.   Alvisi M.   Cingolani R.   Ligonzo T.   Lamendola R.   Tapfer L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 80-84

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